# US 7,466,889 B1 · High-quality-factor tunable microdisk

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- Number: US 7,466,889 B1
- Document ID: US7466889B1
- Status: Granted
- Kind: B1
- Application number: 11/572,633
- Filed: 2006-02-02
- Published: 2008-11-27
- Granted: 2008-12-16
- Earliest claimed: 2004-07-26
- Assignees: Ben Gurion University of the Neger Research and Development Authority
- Inventors: Michael Rosenblit; Ron Folman
- Web page: https://patentgrep.com/patent/US7466889B1

## CPC

- G02F 1/025: in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence)
- G02B 6/12007: {forming wavelength selective elements, e.g. multiplexer, demultiplexer}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optical device includes a waveguide and a microdisk that is optically coupled to the waveguide. The gap between the microdisk and the waveguide is between 0.3 microns and 0.7 microns. The diameter of the microdisk is between 15 microns and 50 microns. The quality factor of the microdisk is at least 105. The microdisk is tuned optoelectrically or piezoelectrically.

## Claims

### Claim 1

An optical device comprising:
(a) a waveguide; and
(b) a microdisk, optically coupled to the waveguide, separated from said waveguide by a gap of between about 0.3 microns and about 0.7 microns and having a diameter of between about 15 microns and about 50 microns and a quality factor of at least about 105.

### Claim 2 (depends on 1)

The optical device of claim 1, wherein said microdisk is substantially cylindrical.

### Claim 3 (depends on 1)

The optical device of claim 1, wherein said microdisk is substantially toroidal.

### Claim 4 (depends on 1)

The optical device of claim 1, wherein said waveguide is tapered for mode matching with said microdisk.

### Claim 5 (depends on 1)

The optical device of claim 1, wherein said waveguide and said microdisk are fabricated on a common substrate.

### Claim 6 (depends on 1)

The optical device of claim 1, wherein said diameter is at most about 30 microns.

### Claim 7 (depends on 1)

The optical device of claim 1, wherein said diameter is at most about 20 microns.

### Claim 8 (depends on 1)

The optical device of claim 1, wherein said gap is at least about 0.5 microns and said quality factor is at least about 106.

### Claim 9 (depends on 1)

The optical device of claim 1, wherein said gap is about 0.7 microns and said quality factor is at least about 107.

### Claim 10 (depends on 1)

The optical device of claim 1, further comprising:
(c) a mechanism for tuning said microdisk.

### Claim 11 (depends on 1)

The optical device of claim 1, wherein said mechanism is an optoelectric mechanism.

### Claim 12 (depends on 1)

The optical device of claim 1, wherein said mechanism is a piezoelectric mechanism.