# US 7,466,475 B2 · Light blocking electrical interconnect

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- Number: US 7,466,475 B2
- Document ID: US7466475B2
- Status: Granted
- Kind: B2
- Application number: 11/743,976
- Filed: 2007-05-03
- Published: 2007-09-06
- Granted: 2008-12-16
- Earliest claimed: 2005-02-18
- Assignees: Hewlett-Packard Development Company, L.P.
- Inventors: Eric T. Martin
- Web page: https://patentgrep.com/patent/US7466475B2

## CPC

- G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)}
- G02B 1/11: Anti-reflection coatings
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An electrical interconnect to block light for use with an array of micro electromechanical machines separated by the first breaks includes a layer of an electrically conductive and an electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.

## Claims

### Claim 1

A device comprising:
a circuitry layer;
a movable member;
a conductive layer between the circuitry and the movable member;
a conductive plate between the movable member and the conductive layer;
a first charge transmitting flexure extending from the conductive layer to the movable member; and
a second charge transmitting flexure extending from the conductive layer to the movable member.

### Claim 2 (depends on 1)

The device of claim 1, wherein the conductive layer is electrically isolated from the conductive plate.

### Claim 3 (depends on 2)

The device of claim 2, wherein the device is part of a display.

### Claim 4 (depends on 3)

The device of claim 3, wherein the device is part of a spatial light modulator.

### Claim 5 (depends on 1)

The device of claim 1, wherein the movable member is semi-transparent and semi-reflective.

### Claim 6 (depends on 5)

The device of claim 5, wherein the conductive plate is reflective.

### Claim 7 (depends on 1)

The device of claim 1 including a third charge transmitting flexure extending from the conductive layer to the movable member.

### Claim 8 (depends on 1)

The device of claim 1 including a fourth charge transmitting flexure extending from the conductive layer to the movable member.

### Claim 9 (depends on 1)

The device of claim 1, wherein the movable member has a center point and wherein the conductive layer extends opposite the center point.

### Claim 10 (depends on 1)

The device of claim 1, wherein the movable member has a first face with a first surface area and wherein the electrical interconnect layer has a second face facing the first face and having a second surface area of at least 80% of the first surface area.

### Claim 11 (depends on 1)

The device of claim 1, wherein the electrical interconnect area has a surface area of at least 70 square microns opposite the movable member.

### Claim 12 (depends on 1)

The device of claim 1, wherein the electrical interconnect layer is non-rectangular.

### Claim 13 (depends on 1)

The device of claim 1, wherein the movable member has a first edge and a second opposite edge and wherein the electrical interconnect layer spans the first edge and the second edge.

### Claim 14

A light modulator comprising:
a pixel plate;
a circuitry layer;
a conductive plate between the circuitry layer and the pixel plate; and
means spanning the pixel plate for transmitting electrical charge from the circuit layer to the pixel plate.