# US 7,466,397 B2 · Safety mechanism for a lithographic patterning device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,466,397 B2 - Document ID: US7466397B2 - Status: Granted - Kind: B2 - Application number: 10/894,361 - Filed: 2004-07-20 - Published: 2005-04-21 - Granted: 2008-12-16 - Earliest claimed: 2003-07-22 - Assignees: ASML Netherlands B.V. - Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven; Gert-Jan Heerens - Web page: https://patentgrep.com/patent/US7466397B2 ## CPC - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - G03F 7/70716: {Stages} - G03F 7/70741: {Handling masks outside exposure position, e.g. reticle libraries} - G03F 7/70783: {Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight} - G03F 7/70825: {Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707)} - G03F 7/709: {Vibration, e.g. vibration detection, compensation, suppression or isolation} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A lithographic apparatus equipped with a patterning device safety mechanism, is presented herein. In one embodiment, the apparatus comprises an illumination system for providing a beam of radiation, a support structure for supporting a patterning device that serves to impart the beam of radiation with a pattern in its cross-section, a substrate holder for holding a substrate having a plurality of target portions, a projection system for projecting the patterned beam onto the substrate target portions, a connector for securing the patterning device relative to the support structure, and a safety mechanism configured to reduce uncontrolled displacement of the patterning device in case of failure of the connector. ## Claims ### Claim 1 A mechanism for containing displacement of a patterning device connected to a movable support structure, comprising: at least one x-directed stopping structure and at least one y-directed stopping structure, said x-directed stopping structure and said y-directed stopping structure configured to contain said patterning device relative to the support structure along the xy plane of said patterning device; and at least one z-directed stopping structure configured to contain said patterning device relative to said support structure along a direction out of the xy plane of said patterning device, wherein the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, is moveable to allow movement of said patterning device during an exchange of said patterning device, and wherein the x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, substantially does not contact the patterning device when the patterning device occupies its nominal position relative to the support structure. ### Claim 2 (depends on 1) The mechanism of claim 1, wherein said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, is operated by a positioning system used during the exchange. ### Claim 3 (depends on 1) The mechanism of claim 1, wherein said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, is operated by a dedicated actuator. ### Claim 4 (depends on 1) The mechanism of claim 1, wherein a distance between said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, and said patterning device when the patterning device occupies its nominal position relative to said support structure is about 1 mm to about 3 mm. ### Claim 5 (depends on 1) The mechanism of claim 1, wherein said x-directed stopping structure and y-directed stopping structure are attached to said support structure. ### Claim 6 (depends on 1) The mechanism of claim 1, comprising at least an integrated xy-directed stopping structure. ### Claim 7 (depends on 1) The mechanism of claim 1, further comprising a connector configured to secure said patterning device relative to the support structure; and wherein the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, is configured to contain displacement of said patterning device in case of failure of said connector. ### Claim 8 (depends on 1) The mechanism of claim 1, comprising at least three x-directed stopping structures, at least three y-directed stopping structures, and at least three z-directed stopping structures. ### Claim 9 (depends on 1) The mechanism of claim 1, wherein the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, comprises a flexible element and a holding element, the flexible element being attached to the support structure, and the holding element being attached to the flexible element. ### Claim 10 (depends on 9) The mechanism of claim 9, wherein the flexible element is a leaf spring. ### Claim 11 (depends on 9) The mechanism of claim 9, wherein the flexible element is a spring mounted pin. ### Claim 12 (depends on 9) The mechanism of claim 9, comprising three flexible elements, each provided with a holding element. ### Claim 13 (depends on 1) The mechanism of claim 1, further comprising: a positioning system configured to position said patterning device relative to said support structure, wherein (i) during a projection phase, said patterning device is secured to said support structure by a connector while a patterned beam is projected onto a target portion of a substrate, (ii) during the exchange, said patterning device is exchanged using the positioning system to position said patterning device relative to said support structure, at least a part of said positioning system being withdrawn after said patterning device has been positioned, and (iii) the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, is configured to contain said patterning device in case of failure of said connector at least during the projection phase. ### Claim 14 (depends on 13) The mechanism of claim 13, wherein, during the exchange, said positioning system performs positioning movements including the withdrawal of at least a part of said positioning system after said patterning device has been positioned, wherein said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, is configured to contain said patterning device in case of failure of the connector in a safety mode, and wherein, during the exchange, said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or combination, is activated from an inactive mode based on a positioning movement of said positioning system. ### Claim 15 (depends on 13) The mechanism of claim 13, wherein said positioning system comprises a reticle carrier configured to operate said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof. ### Claim 16 (depends on 13) The mechanism of claim 13, wherein a part of said positioning system configured to operate said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, comprises an interface configured to engage said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof. ### Claim 17 A method for containing displacement of a patterning device connected to a movable support structure, comprising: containing said patterning device relative to the support structure along an xy plane of said patterning device using a x-directed stopping structure and a y-directed stopping structure; containing said patterning device relative to said support structure along a direction out of the xy plane of said patterning device using a z-directed stopping structure; and moving the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, to allow movement of said patterning device during an exchange of said patterning device, wherein the x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, substantially does not contact the patterning device when the patterning device occupies its nominal position relative to the support structure. ### Claim 18 (depends on 17) The method of claim 17, comprising operating said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, using a positioning system used during the exchange. ### Claim 19 (depends on 17) The method of claim 17, comprising operating said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, by a dedicated actuator. ### Claim 20 (depends on 17) The method of claim 17, wherein a distance between said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, and said patterning device when the patterning device occupies its nominal position relative to said support structure is about 1 mm to about 3 mm. ### Claim 21 (depends on 17) The method of claim 17, wherein said x-directed stopping structure and y-directed stopping structure are attached to said support structure. ### Claim 22 (depends on 17) The method of claim 17, comprising containing said patterning device using an integrated xy-directed stopping structure. ### Claim 23 (depends on 17) The method of claim 17, further comprising securing said patterning device relative to the support structure using a connector and comprising containing displacement of said patterning device in case of failure of said connector using the x-directed stopping structure, the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof. ### Claim 24 (depends on 17) The method of claim 17, comprising containing said patterning device using at least three x-directed stopping structures, at least three y-directed stopping structures, and at least three z-directed stopping structures. ### Claim 25 (depends on 17) The method of claim 17, wherein the x-directed stopping structure, or the y-directed stopping structure, or the z-directed stopping structure, or any combination thereof, comprises a flexible element and a holding element, the flexible element being attached to the support structure, and the holding element being attached to the flexible element. ### Claim 26 (depends on 25) The method of claim 25, wherein the flexible element comprises a leaf spring. ### Claim 27 (depends on 25) The method of claim 25, wherein the flexible element comprises a spring mounted pin. ### Claim 28 (depends on 25) The method of claim 25, comprising three flexible elements, each provided with a holding element. ### Claim 29 (depends on 17) The method of claim 17, further comprising: positioning said patterning device relative to said support structure using a positioning system; securing said patterning device to the support structure using a connector, during a projection phase, while a patterned beam is projected onto a target portion of a substrate; exchanging said patterning device during the exchange using a positioning system that positions said patterning device relative to the support structure, at least a part of said positioning system being withdrawn after said patterning device has been positioned; and containing said patterning device in case of failure of said connector at least during the projection phase. ### Claim 30 (depends on 29) The method of claim 29, further comprising: performing, during the exchange, positioning movements by said positioning system, including the withdrawal of at least a part of said positioning system after said patterning device has been positioned; containing said patterning device in case of failure of the connector in a safety mode; and activating, during the exchange, said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, from an inactive mode based on a positioning movement of said positioning system. ### Claim 31 (depends on 29) The method of claim 29, wherein said positioning system comprises a reticle carrier configured to operate said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof. ### Claim 32 (depends on 29) The method of claim 29, wherein a part of said positioning system that operates said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or combination, comprises an interface configured to engage said moveable x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof. ### Claim 33 A mechanism for containing displacement of a patterning device connected to a movable support structure, comprising: a x-directed stopping structure and a y-directed stopping structure, said x-directed stopping structure and said y-directed stopping structure configured to contain said patterning device relative to the support structure along the xy plane of said patterning device; and a z-directed stopping structure configured to contain said patterning device relative to said support structure along a direction out of the xy plane of said patterning device; and a connector configured to secure said patterning device relative to the support structure, wherein the z-directed stopping structure is moveable to allow movement of said patterning device during an exchange of said patterning device and configured to contain displacement of said patterning device in case of failure of said connector, wherein the x-directed stopping structure, or y-directed stopping structure, or z-directed stopping structure, or any combination thereof, substantially does not contact the patterning device when the patterning device occupies its nominal position relative to the support structure.