# US 7,466,390 B2 · Active matrix displays and other electronic devices having plastic substrates

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- Number: US 7,466,390 B2
- Document ID: US7466390B2
- Status: Granted
- Kind: B2
- Application number: 10/579,309
- Filed: 2004-11-17
- Published: 2007-04-26
- Granted: 2008-12-16
- Earliest claimed: 2003-11-21
- Assignees: Koninklijke Philips Electronics N.V.
- Inventors: Ian D. French; David J. McCulloch
- Web page: https://patentgrep.com/patent/US7466390B2

## CPC

- H10D 86/0214: {using temporary substrates}
- G02F 1/133305: {Flexible substrates, e.g. plastics, organic film}
- G02F 1/167: by electrophoresis
- G02F 1/16755: Substrates
- H10D 86/40: characterised by multiple TFTs
- H10D 86/60: wherein the TFTs are in active matrices
- H10P 72/74: {using temporarily an auxiliary support}
- G02F 1/13415: {Drop filling process}
- H10D 30/6758: {characterised by the insulating substrates}
- H10K 59/12: Active-matrix OLED [AMOLED] displays
- H10K 59/1201: {Manufacture or treatment}
- H10K 71/421: {using coherent electromagnetic radiation, e.g. laser annealing}
- H10K 71/80: using temporary substrates
- H10K 2102/311: {Flexible OLED}
- H10P 72/7426: {used as a support during build up manufacturing of active devices}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A method of manufacturing an active matrix display device involves manufacturing a first substrate arrangement comprising a rigid glass substrate and an overlying plastic substrate. Pixel circuits are formed over the plastic substrate. The rigid glass substrate (12) is only removed from the plastic substrate after the mounting of the active and passive plates of the display into display modules (10). This method enables substantially conventional substrate handling, processing and cell making to be employed, for example in standard AMLCD factories, with only minimal extra equipment needed. A more general manufacturing method is also disclosed for fabricating TFTs on a spin-on plastic layer.

## Claims

### Claim 1

A thin film electronic device, comprising:
a parylene substrate;
thin film electronic elements disposed over the parylene substrate; and
an active matrix display, the thin film electronic elements defining active matrix pixel circuits, and the device further comprises a display layer over the active matrix pixel circuits.

### Claim 2 (depends on 1)

A device as claimed in claim 1, wherein the display layer comprises a selectively reflective display layer.

### Claim 3 (depends on 2)

A device as claimed in claim 2, wherein the selectively reflective display layer comprises electrophoretic material.

### Claim 4 (depends on 1)

A device as claimed in claim 1, wherein the display layer over the array of pixel circuits comprises an LED layer.

### Claim 5 (depends on 1)

A device as claimed in claim 1, further comprising a second substrate arrangement, and wherein the display layer comprises electro-optic material sandwiched between the first and second substrates.

### Claim 6 (depends on 5)

A device as claimed in claim 5, wherein the electro-optic material comprises LC material.