# US 7,466,060 B2 · Piezoelectric driving type MEMS apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,466,060 B2 - Document ID: US7466060B2 - Status: Granted - Kind: B2 - Application number: 11/100,472 - Filed: 2005-04-07 - Published: 2006-06-08 - Granted: 2008-12-16 - Earliest claimed: 2004-12-08 - Assignees: Kabushiki Kaisha Toshiba - Inventors: Tamio Ikehashi - Web page: https://patentgrep.com/patent/US7466060B2 ## CPC - H01G 5/18: due to change in inclination, e.g. by flexing, by spiral wrapping - H01G 5/38: Multiple capacitors, e.g. ganged - H01H 57/00: Electrostrictive relays; Piezoelectric relays - H10N 30/2042: {Cantilevers, i.e. having one fixed end} - H10N 30/2043: {connected at their free ends, e.g. parallelogram type} - H01H 2057/006: {Micromechanical piezoelectric relay} - H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10) - H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract A piezoelectric driving type MEMS apparatus includes: a supporting portion provided on a substrate; and a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator. ## Claims ### Claim 1 A piezoelectric driving type MEMS apparatus comprising: a supporting portion provided on a substrate; a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator, wherein the piezoelectric actuator further comprises an insulating film supported by the supporting portion in a cantilever and a first electrode provided on an end portion of the insulating film which is opposed from the supporting portion, the driving electrode has a first driving electrode and a second driving electrode, the first driving electrode is provided on the insulating film so as to be electrically separated from the first electrode, the piezoelectric film is provided on the first driving electrode, and the second driving electrode is provided on the piezoelectric film; and a second electrode is provided on the substrate so as to be opposed to the first electrode, wherein the slits are plural, and the respective slits penetrate the insulating film, the first driving electrode, the piezoelectric film and the second driving electrode. ### Claim 2 (depends on 1) A piezoelectric driving type MEMS apparatus according to claim 1, wherein the piezoelectric driving type MEMS apparatus is a variable capacitor or a switch. ### Claim 3 (depends on 1) A piezoelectric driving type MEMS apparatus according to claim 1, wherein the slits are provided in a mesh. ### Claim 4 (depends on 1) A piezoelectric driving type MEMS apparatus according to claim 1, wherein the driving electrode includes a first driving electrode to a third driving electrode, the piezoelectric film includes a first piezoelectric film and a second piezoelectric film, the first piezoelectric film is provided on the first driving electrode, the second driving electrode is provided on the first piezoelectric film, the second piezoelectric film is provided on the second driving electrode, and the third driving electrode is provided on the second piezoelectric film. ### Claim 5 (depends on 4) A piezoelectric driving type MEMS apparatus according to claim 4, wherein the slits are plural, and the respective slits penetrates the insulating film, the first driving electrode, the first piezoelectric film, the second driving electrode, the second piezoelectric film and the third driving electrode. ### Claim 6 A piezoelectric driving type MEMS apparatus comprising: a supporting portion provided on a substrate; a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator, wherein the piezoelectric actuator further comprises an insulating film supported by the supporting portion in a both end supporting and a first electrode provided at a central portion of the insulating film, the driving electrode has a first driving electrode and a second driving electrode, the first driving electrode is provided on each of both end portions of the insulating film so as to be electrically separated from the first electrode, the piezoelectric film is provided on the first driving electrode, and the second driving electrode is provided on the piezoelectric film; and a second electrode is provided on the substrate so as to be opposed to the first electrode, wherein the slits are plural, and the respective slits penetrate the insulating film, the first driving electrode, the piezoelectric film and the second driving electrode. ### Claim 7 (depends on 6) A piezoelectric driving type MEMS apparatus according to claim 6, wherein the piezoelectric driving type MEMS apparatus is a variable capacitor or a switch. ### Claim 8 (depends on 1) A piezoelectric driving type MEMS apparatus according to claim 1, further comprising: a leading electrode provided with a connecting portion connecting to the first electrode, wherein one end of the leading electrode is supported by a second supporting portion provided on the substrate, and the connecting portion are provided with a plurality of slits. ### Claim 9 (depends on 8) A piezoelectric driving type MEMS apparatus according to claim 8, wherein the slits are provided in a mesh. ### Claim 10 (depends on 6) A piezoelectric driving type MEMS apparatus according to claim 6, wherein the driving electrode has a first driving electrode to a third driving electrode, the piezoelectric film has a first piezoelectric film and a second piezoelectric film, the first piezoelectric film is provided on the first driving electrode, the second driving electrode is provided on the first piezoelectric film, the second piezoelectric film is provided on the second driving electrode, and the third driving electrode is provided on the second piezoelectric film. ### Claim 11 (depends on 10) A piezoelectric driving type MEMS apparatus according to claim 10, wherein the slits are plural and the respective slits penetrate the insulating film, the first driving electrode, the first piezoelectric film, the second driving electrode, the second piezoelectric film and the third driving electrode. ### Claim 12 (depends on 11) A piezoelectric driving type MEMS apparatus according to claim 11, wherein the piezoelectric driving type MEMS apparatus is a variable capacitor or a switch. ### Claim 13 A piezoelectric driving type MEMS apparatus, comprising: a supporting portion provided on a substrate; a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator, wherein a first electrode is provided on the substrate, the piezoelectric actuator further comprises an insulating film supported by the supporting portion in a both end supporting and a second electrode provided on a central portion of the insulating film so as to be opposed to the first electrode, and the driving electrode comprises a first driving electrode and a second driving electrode, the first driving electrode is provided on each of both end portions on a face of the insulating film which is opposed to the first electrode so as to be electrically separated from the first electrode, the piezoelectric film is provided on the first driving electrode, and the second driving electrode is provided on the piezoelectric film, wherein the slits are plural, and the respective slits penetrate the insulating film, the first driving electrode, the piezoelectric film and the second driving electrode. ### Claim 14 (depends on 13) A piezoelectric driving type MEMS apparatus according to claim 13, wherein the piezoelectric driving type MEMS apparatus is a variable capacitor or a switch. ### Claim 15 (depends on 13) A piezoelectric driving type MEMS apparatus according to claim 13, wherein the slits are provided in a mesh.