# US 7,465,619 B2 · Methods of fabricating dual layer semiconductor devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,465,619 B2 - Document ID: US7465619B2 - Status: Granted - Kind: B2 - Application number: 11/130,575 - Filed: 2005-05-17 - Published: 2005-10-06 - Granted: 2008-12-16 - Earliest claimed: 2001-08-09 - Assignees: AmberWave Systems Corporation - Inventors: Eugene A. Fitzgerald - Web page: https://patentgrep.com/patent/US7465619B2 ## CPC - H10D 30/791: {Arrangements for exerting mechanical stress on the crystal lattice of the channel regions} - H10D 30/751: {having composition variations in the channel regions} - H10D 30/798: {being provided in or under the channel regions} - H10D 84/0167: {Manufacturing their channels} - H10D 84/038: {using silicon technology, e.g. SiGe} - Y10S 438/933: Germanium or silicon or Ge-Si on III-V - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract A semiconductor-based device includes a channel layer, which includes a distal layer and a proximal layer in contact with the distal layer. The distal layer supports at least a portion of hole conduction for at least one p-channel component, and the proximal layer supports at least a portion of electron conduction for at least one n-channel component. The proximal layer has a thickness that permits a hole wave function to effectively extend from the proximal layer into the distal layer to facilitate hole conduction by the distal layer. A method for fabricating a semiconductor-based device includes providing a distal portion of a channel layer and providing a proximal portion of the channel layer. ## Claims ### Claim 1 A method for fabricating a semiconductor-based device, the method comprising: forming a channel layer by: providing a compressively strained distal layer to support hole conduction for at least one p-channel component; providing a proximal layer in contact with the distal layer and having a thickness less than approximately 4 nm that facilitates hole conduction by the distal layer, the channel layer comprising the distal and the proximal layers; forming the at least one p-channel component; and forming at least one n-channel component, the at least one p-channel component and the at least one n-channel component each having the channel layer in contact with a dielectric layer, wherein the distal layer is in contact with an unstrained substrate layer. ### Claim 2 (depends on 1) The method of claim 1, further comprising providing a substrate layer comprising silicon and germanium, and wherein the proximal layer comprises tensilely strained silicon, and the compressively strained distal layer comprises at least one of compressively strained silicon and germanium. ### Claim 3 A method for fabricating a semiconductor-based device, the method comprising: providing a distal material to support hole conduction for at least one p-channel component; providing a proximal material in contact with the distal material and having a thickness less than approximately 4 nm that facilitates hole conduction by the distal material; and forming the at least one p-channel component having a channel comprising a portion of the distal material and a portion of the proximal material, wherein the channel of the at least one p-channel component is in contact with a dielectric layer, the distal material comprises compressively strained Si1-yGey, and the strain in the distal material is induced by relaxed material in contact with the distal material. ### Claim 4 (depends on 3) The method of claim 3, wherein the relaxed material comprises Si1-xGex. ### Claim 5 (depends on 4) The method of claim 4, wherein a difference between y and x is selected from a range of 0.2 to 0.4. ### Claim 6 (depends on 3) The method of claim 3, wherein at least a portion of the channel is disposed above the relaxed material. ### Claim 7 (depends on 3) The method of claim 3, wherein the channel comprises silicon. ### Claim 8 (depends on 3) The method of claim 3, wherein the channel is disposed over the relaxed material. ### Claim 9 (depends on 3) The method of claim 3, wherein forming the at least one p-channel component comprises forming a source and a drain proximate the channel, each of the source and the drain comprising compressively strained Si1-yGey. ### Claim 10 A method for fabricating a semiconductor-based device, the method comprising: providing an n-channel component comprising a first strained silicon channel; and providing a p-channel component comprising a second strained silicon channel proximate a dielectric layer; wherein the second strained silicon channel is disposed proximate compressively strained Si1-yGey, the n-channel component has a first drive current enhancement relative to an unstrained reference n-channel component, the p-channel component has a second drive current enhancement relative to an unstrained reference p-channel component, and the second drive current enhancement is larger than the first drive current enhancement. ### Claim 11 (depends on 10) The method of claim 10, wherein forming the p-channel component comprises forming a source and a drain proximate the second strained silicon channel, each of the source and the drain comprising compressively strained Si1-yGey, and forming the source and the drain comprises forming a germanosilicide contact in each of the source and the drain. ### Claim 12 (depends on 10) The method of claim 10, wherein the first strained silicon channel is tensilely strained. ### Claim 13 (depends on 10) The method of claim 10, further comprising: forming a shallow trench isolation region proximate at least one of the n-channel component and the p-channel component. ### Claim 14 (depends on 13) The method of claim 13, wherein the shallow trench isolation region is disposed proximate a material comprising compressively strained Si1-yGey. ### Claim 15 (depends on 10) The method of claim 10, wherein the n-channel component and the p-channel component define an inverter. ### Claim 16 (depends on 10) The method of claim 10, wherein the first strained silicon channel and the second strained silicon channel both operate as surface channels during operation. ### Claim 17 (depends on 10) The method of claim 10, wherein the n-channel component and the p-channel component are each provided over an insulating layer disposed within a substrate. ### Claim 18 (depends on 17) The method of claim 17, wherein the insulating layer is disposed under and in direct contact with SiGe.