Clean room unit
AssigneeTosho, Inc.
InventorsShiro Ohmura, Yoshihito Ohmura, Hideaki Hirobe, Takehiko Imura
Life of this patent
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AssigneeTosho, Inc.
InventorsShiro Ohmura, Yoshihito Ohmura, Hideaki Hirobe, Takehiko Imura
Estimating the term…
A clean room unit which is equipped with a work room and a clean bench unit can be independently installed inside a building, can generate an air shower in the work room, and can realize miniaturization and cost reduction. The clean room has a work room, a clean bench unit which has a work opening and has the work opening installed to look onto the work room, an air conditioning system which can perform purification and pressure control of air inside the work room and the clean bench unit and can generate an air shower in the work room, and a control unit. The air conditioning system is controlled by the control unit to switch exclusively between the air shower mode, the ventilation mode, the positively-pressurized work mode, and the negatively-pressurized work mode.
A clean room unit which is provided with a work room isolated from the exterior and a clean bench unit which has a work opening facing to the work room and is installed independently inside a building:
Dependencies are inferred from the claim text.