# US 7,465,028 B2 · Nozzle assembly having a thermal actuator with active and passive beams

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- Number: US 7,465,028 B2
- Document ID: US7465028B2
- Status: Granted
- Kind: B2
- Application number: 11/967,235
- Filed: 2007-12-30
- Published: 2008-05-01
- Granted: 2008-12-16
- Earliest claimed: 2000-05-23
- Assignees: Silverbrook Research Pty Ltd
- Inventors: Kia Silverbrook
- Web page: https://patentgrep.com/patent/US7465028B2

## CPC

- B41J 2/175: Ink supply systems {; Circuit parts therefor}
- B41J 2/14: Structure thereof {only for on-demand ink jet heads}
- B41J 2/1433: {Structure of nozzle plates}
- B41J 2/14427: {Structure of ink jet print heads with thermal bend detached actuators}
- B41J 2/145: Arrangement thereof
- B41J 2/1628: {dry etching}
- B41J 2/1631: {photolithography}
- B41J 2/1639: {sacrificial molding}
- B41J 2/1642: {thin film formation by CVD [chemical vapor deposition]}
- B41J 2/1645: {thin film formation by spincoating}
- B41J 2/1646: {thin film formation by sputtering}
- B41J 2/1648: {Production of print heads with thermal bend detached actuators}
- B41J 2/17523: {Ink connection}
- B41J 2/17553: {Outer structure}
- B41J 2/195: for monitoring ink quality
- B41J 29/02: Framework
- B41J 2002/14362: {Assembling elements of heads}
- B41J 2002/14419: {Manifold}
- B41J 2002/14435: {Moving nozzle made of thermal bend detached actuator}
- B41J 2002/14443: {Nozzle guard}
- B41J 2002/14491: {Electrical connection}
- B41J 2202/19: Assembling head units
- B41J 2202/20: Modules
- Y10T 29/49126: Assembling bases
- Y10T 29/49128: Assembling formed circuit to base
- Y10T 29/49147: Assembling terminal to base
- Y10T 29/49156: with selective destruction of conductive paths
- Y10T 29/49401: Fluid pattern dispersing device making, e.g., ink jet
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The invention relates to a nozzle assembly for a printhead. The assembly includes a substrate which defines an ink inlet aperture, the substrate having a layer of micro-electromechanical drive circuitry, a wall portion bounding the ink inlet aperture, and a crown portion that defines a nozzle opening. The assembly also includes a skirt portion depending from the crown portion to form part of a peripheral wall of the nozzle assembly, the crown and skirt portions being displaceable with respect to the wall portion towards the substrate to alter a volume of a nozzle chamber defined by the wall, crown and skirt portions such that when the volume is altered, ink is ejected from the nozzle opening. Also included is a thermal actuator that interconnects the crown and skirt portions with the substrate and is configured to operatively receive an electrical signal from the drive circuitry to displace the crown and skirt portions to alter the volume of the nozzle chamber, the actuator having a first active beam arranged above a second passive beam, the beams fabricated with a conductive ceramic material.

## Claims

### Claim 1

A nozzle assembly for a printhead, the assembly comprising:
a substrate which defines an ink inlet aperture, the substrate having a layer of micro-electromechanical drive circuitry;
a wall portion bounding the ink inlet aperture;
a crown portion that defines a nozzle opening;
a skirt portion depending from the crown portion to form part of a peripheral wall of the nozzle assembly, the crown and skirt portions being displaceable with respect to the wall portion towards the substrate to alter a volume of a nozzle chamber defined by the wall, crown and skirt portions such that when the volume is altered, ink is ejected from the nozzle opening; and
a thermal actuator that interconnects the crown and skirt portions with the substrate and is configured to operatively receive an electrical signal from the drive circuitry to displace the crown and skirt portions to alter the volume of the nozzle chamber, the actuator having a first active beam arranged above a second passive beam, the beams fabricated with a conductive ceramic material.

### Claim 2 (depends on 1)

The nozzle assembly of claim 1, in which the wall portion and skirt portion are configured to define a fluidic seal to inhibit the egress of ink during relative displacement.

### Claim 3 (depends on 1)

The nozzle assembly of claim 1, wherein the nozzle opening is arranged at an angle to the vertical so that ejection of ink deviates from the perpendicular.

### Claim 4 (depends on 1)

The nozzle assembly of claim 1, wherein the wall portion bounds the aperture and extends upwardly from the floor portion, the skirt portion defining a first part of a peripheral wall of the nozzle chamber and the wall portion defining a second part of the peripheral wall of the nozzle chamber.

### Claim 5 (depends on 1)

The nozzle assembly of claim 1, wherein the actuator is connected to an anchor extending upwardly from the substrate, said anchor mounted on conductive pads which form an electrical connection with the actuator.

### Claim 6 (depends on 1)

The nozzle assembly of claim 1, having a nozzle guard which includes a planar cover member positioned on a support structure extending from the substrate, the planar cover member defining a plurality of passages, each passage being in register with a respective nozzle opening.

### Claim 7 (depends on 6)

The nozzle assembly of claim 6, in which the support structure of the nozzle guard defines a number of openings that permit the ingress of air into a region between the printhead and the cover member, so that the air can pass through the passages.
