# US 7,464,458 B2 · Method for manufacturing a self-aligned, notched trailing shield for perpendicular recording

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- Number: US 7,464,458 B2
- Document ID: US7464458B2
- Status: Granted
- Kind: B2
- Application number: 11/830,552
- Filed: 2007-07-30
- Published: 2007-11-22
- Granted: 2008-12-16
- Earliest claimed: 2004-02-27
- Assignees: Hitachi Global Storage Technologies Netherlands B.V.
- Inventors: Quang Le; Aron Pentek
- Web page: https://patentgrep.com/patent/US7464458B2

## CPC

- G11B 5/112: {Manufacture of shielding device}
- G11B 5/1278: {specially adapted for magnetisations perpendicular to the surface of the record carrier}
- H01F 41/32: for applying conductive, insulating or magnetic material on a magnetic film {, specially adapted for a thin magnetic film}
- Y10T 29/49039: with dual gap materials
- Y10T 29/49041: with significant slider/housing shaping or treating
- Y10T 29/49043: Depositing magnetic layer or coating
- Y10T 29/49044: Plural magnetic deposition layers
- Y10T 29/49046: with etching or machining of magnetic material
- Y10T 29/49048: Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T 29/49052: by etching
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A perpendicular magnetic write head having a notched, self aligned trailing shield for canting a magnetic field emitted therefrom.

## Claims

### Claim 1

A method for constructing a write head for perpendicular magnetic recording, comprising:
depositing a layer of write pole material;
depositing a non-magnetic write gap material over said write pole material;
forming a magnetic shield pedestal over said write gap material layer, said shield pedestal having first and second lateral sides defining planes perpendicular to an air bearing surface; and
performing a material removal process to remove selected portions of said write gap layer and said write pole material using said shield pedestal as a mask to prevent removal of said write gap material and said write pole material disposed beneath said shield pedestal;
wherein a distance between said first and second lateral sides of said shield pedestal defines a track width and wherein said shield pedestal has a depth in a direction perpendicular to said air bearing surface that is less than said track width.

### Claim 2 (depends on 1)

A method as in claim 1 wherein said material removal process comprises ion milling.

### Claim 3 (depends on 1)

A method as in claim 1 wherein said material removal process comprises ion milling at an angle between 0 and 90 degrees with respect to at least one of said lateral side walls of said shield pedestal.

### Claim 4

A method for constructing a write head for perpendicular magnetic recording, comprising:
depositing a layer of write pole material;
depositing a non-magnetic write gap material over said write pole material;
forming a magnetic shield pedestal over said write gap material layer, said shield pedestal having first and second lateral sides defining planes perpendicular to an air bearing surface; and
performing a material removal process to remove selected portions of said write gap layer and said write pole material using said shield pedestal as a mask to prevent removal of said write gap material and said write pole material disposed beneath said shield pedestal;
wherein said shield pedestal is constructed of a laminated magnetic layers.

### Claim 5

A method for constructing a write head for perpendicular magnetic recording, comprising:
depositing a layer of write pole material;
depositing a non-magnetic write gap material over said write pole material;
forming a magnetic shield pedestal over said write gap material layer, said shield pedestal having first and second lateral sides defining planes perpendicular to an air bearing surface;
performing a material removal process to remove selected portions of said write gap layer and said write pole material using said shield pedestal as a mask to prevent removal of said write gap material and said write pole material disposed beneath said shield pedestal; and
depositing a magnetic main shield portion over said shield pedestal; and
performing a second material removal process, using said magnetic main shield material as a mask to remove selected portions of said shield pedestal to define a throat height of said shield pedestal, said throat height being a dimension measured from said air bearing surface.

### Claim 6 (depends on 5)

A method as in claim 5, wherein said second material removal process comprises ion milling.