Micro-resonator, frequency filter and communication apparatus
AssigneeSony Corporation
InventorKoji Naniwada
Life of this patent
Estimating the term…
Abstract
A highly reliable micro-resonator and communication apparatus is provided in which an influence on a substrate caused by an interaction generated by an oscillation between adjacent micro-resonant elements is eliminated. The micro-resonant element includes a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate, in which a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
Claims13
A micro-resonator comprising:
- a plurality of micro-resonant elements having a beam structure facing an input electrode and an output electrode which use a micromechanical oscillation provided on the same substrate,
- wherein,
- a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A micro-resonator comprising:
- a plurality of micro-resonant elements connected electrically in parallel, including an input electrode and output electrode disposed on the same substrate and a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other.
A frequency filter comprising:
- a micro-resonator including a plurality of micro-resonant elements having a beam structure facing an input electrode and an output electrode which use a micromechanical oscillation provided on the same substrate,
- wherein a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A frequency filter comprising:
- a micro-resonator including a plurality of micro-resonant elements connected electrically in parallel, which have an input electrode and output electrode disposed on the same substrate and a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other.
A communication apparatus including a filter to limit a band of a transmission signal and/or reception signal, comprising as said filter:
- a filter including a micro-resonator having a plurality of micro-resonant elements having a beam structure facing an input electrode and an output electrode which use a micromechanical oscillation provided on the same substrate, wherein a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A communication apparatus including a filter to limit a band of a transmission signal and/or reception signal, comprising as said filter:
- a filter including a micro-resonator having a plurality of micro-resonant elements connected electrically in parallel, provided with an input electrode and output electrode disposed on the same plane and a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other.
Dependencies are inferred from the claim text.