Method and device for demolding
AssigneeIndustrial Technology Research Institute
InventorsYu-Lun Ho, Jen-Hua Wu, Wei-Han Wang, Shou-Ren Chen, Lai-Sheng Chen
Life of this patent
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Abstract
The present invention relates to a demolding method and device, being used for detaching a mold and a substrate after completing an imprinting process, in which the mold is forced to detach from the substrate partially and form a gap therebetween by inserting at least a blade module between the two, and thus, as air is sucked into the gap and the adhesion force of vacuum effect exerting between the mold and the substrate is eliminated, the blade module is further applied to detach the mold from the substrate completely.
Claims15
A demolding device, comprising:
- a mold;
- a substrate, to be pressed by the mold in an imprinting process;
- and
- at least a blade module, being arranged at a place outside of the mold and the substrate, wherein the blade module further comprises at least a set of a blade and an actuator that is a vibration actuator for issuing a signal of non-specific frequency for enabling the blade to vibrate;
- wherein, at least a portion of each blade module is able to be inserted between the mold and the substrate for forcing the mold to separate from the substrate at least partially.
A demolding method, comprising the steps of:
- inserting a blade of a blade module between a mold and a substrate after completing an imprinting process;
- separating the mold from the substrate at least partially by the use of the blade module, wherein a vibration actuator is used for driving the blade module to separate the mold from the substrate at least partially by issuing a signal of non-specific frequency for enabling the blade to vibrate.
A demolding device, comprising:
- a mold;
- a substrate, to be pressed by the mold in an imprinting process;
- and
- at least a blade module, being arranged at a place outside of the mold and the substrate;
- wherein each blade module further comprises at least a set of a blade and an actuator, wherein the blade module further comprises at least a set of a blade and an actuator that is a vibration actuator for driving the blade to move by issuing a signal of non-specific frequency for enabling the blade to vibrate.
Dependencies are inferred from the claim text.