Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates
AssigneeSokudo Co., Ltd.
InventorsSharathchandra Somayaji, Christopher L. Beaudry, David Quach
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Abstract
A monitor device includes a substrate and a plurality of temperature sensors disposed in the substrate. The monitor device also includes a processor coupled to the substrate and adapted to receive one or more signals from the plurality of temperature sensors. The processor is further adapted to convert the one or more received signals into one or more converted signals. The monitor device further includes a transceiver coupled to the substrate and adapted to receive the one or more converted signals. The transceiver is further adapted to transmit one or more output signals to an external receiver.
Claims17
A monitor device comprising:
- a substrate;
- a plurality of temperature sensors disposed in the substrate;
- a processor disposed on the substrate and adapted to:
- receive one or more signals from the plurality of temperature sensors;
- and
- convert the one or more received signals into one or more converted signals;
- and
- a transceiver coupled to the substrate and adapted to:
- receive the one or more converted signals;
- and
- transmit one or more output signals to an external receiver.
A measurement system for use in a processing chamber of a track lithography tool, the measurement system comprising:
- a wireless temperature measurement wafer comprising:
- a plurality of thermal measurement devices in thermal contact with the wireless temperature measurement wafer;
- one or more processors disposed on the wireless temperature measurement wafer and adapted to convert a signal received from the plurality of thermal measurement devices;
- and
- a transceiver coupled to the wireless temperature measurement wafer, wherein the transceiver is adapted to receive an input signal from the one or more processors and transmit an RF data signal;
- a receiver adapted to receive the RF data signal from the transceiver;
- an external processor in communication with the receiver;
- and
- a display system in communication with the external processor and configured to display data received from the external processor.
Dependencies are inferred from the claim text.