Determining scheduling priority using fabrication simulation
AssigneeAdvanced Micro Devices, Inc.
InventorsPeng Qu, Vijay Devarajau, Michael A. Hillis, Dax Middlebrooks, Farzad Sadjadi, Chandrashekar Krishnaswamy
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Abstract
A method for processing workpieces in a process flow including a plurality of operations includes employing a fabrication simulation model of the process flow to determine an estimated completion time for a selected workpiece. The fabrication simulation model simulates the processing of the selected workpiece and other workpieces in the process flow through the plurality of operations. The priority of the selected workpiece is adjusted based on a comparison between a target completion time for the selected workpiece and the estimated completion time.
Claims27
A method for processing workpieces in a process flow including a plurality of operations, comprising:
- employing a fabrication simulation model of the process flow to determine an estimated completion time for at least one selected workpiece, the fabrication simulation model simulating the processing of the selected workpiece and other workpieces in the process flow through the plurality of operations;
- and
- adjusting a priority of the selected workpiece for a current operation and at least one future operation based on a comparison between a target completion time for the selected workpiece and the estimated completion time.
A system, comprising:
- a plurality of tools for processing workpieces in a process flow including a plurality of operations;
- and
- a priority analyzer operable to employ a fabrication simulation model of the process flow to determine an estimated completion time for at least one selected workpiece, the fabrication simulation model simulating the processing of the selected workpiece and other workpieces in the process flow through the plurality of operations, wherein a priority analyzer adjusts the priority of the selected workpiece for a current operation and at least one future operation based on a comparison between a target completion time for the selected workpiece and the estimated completion time.
A system for processing workpieces in a process flow including a plurality of operations, comprising:
- means for simulating the processing of at least one selected workpiece and other workpieces in the process flow through the plurality of operations to determine an estimated completion time for the selected workpiece;
- and
- means for adjusting a priority of the selected workpiece for a current operation and at least one future operation based on a comparison between a target completion time for the selected workpiece and the estimated completion time.
Dependencies are inferred from the claim text.