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US 7,460,646 B2Granted
Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma
AssigneeKoninklijke Philips Electronics N.V.
InventorPeter Zink
Life of this patent
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Abstract
A method for generating extreme ultraviolet and/or soft X-ray radiation by a plasma that can be generated through irradiation of a material. In order to obtain a reduction in the contamination of an optical illumination system as well as an instantaneous optimization of the power of a radiation source, at least a quantity of the material is controlled by a blocking device.
Claims32
A device for generating extreme ultraviolet and/or soft X-ray radiation, the device comprising:
- means for generating a plasma through irradiation of a material, and
- means for controlling at least a quantity of the material that is introduced into a radiation source, wherein the means for controlling are configured to control a rotation of a disc having at least one void to control the quantity of the material that is introduced into the radiation source.
A method of generating extreme ultraviolet and/or soft X-ray radiation comprising the acts of:
- generating a plasma through irradiation of a material,
- controlling introduction of at least a quantity of the material into a radiation source by controlling a rotation of a disc having at least one void.
A device for generating radiation comprising:
- a radiation source;
- a material source for supplying material to the radiation source for forming a plasma;
- a disc having at least one hole;
- and
- disc drive configured to control a quantity of the material entering the radiation source by controlling a rotation of the disc.
2 more elements
Dependencies are inferred from the claim text.