Ultrasonic transducer for ranging measurement with high directionality using parametric transmitting array in air and a method for manufacturing same

A method for manufacturing multiple resonances type ultrasonic transducer for a ranging measurement with high directionality using a parametric transmitting array in air, comprising the steps of:

• preparing an SOT (Silicon on Insulator) wafer with an intermediate oxidation layer;
• insulating the SOT wafer by forming thin oxidation layers on the top and the bottom surfaces of the wafer;
• forming a lower electrode, a piezoelectric body, and an upper electrode to be laminated in sequence on the top surface of the SOI wafer;
• patterning the upper electrode, the piezoelectric body, and the lower electrode;
• forming an insulating layer for insulating the upper electrode and the lower electrode;
• forming a lining pattern by patterning the insulating layer;
• and
• forming the membrane portion by removing the lower side of the central portion of the wafer and the intermediate oxidation layer after removing the oxidation layer on the bottom surface of the wafer.