Optically addressed MEMS
AssigneeTrex Enterprises Corp.
InventorDonald Bruns
Life of this patent
Estimating the term…
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AssigneeTrex Enterprises Corp.
InventorDonald Bruns
Estimating the term…
Optically controlled micro-electromechanical systems (MEMS) is disclosed. In one embodiment, a MEMS device may include a rotatable mirror having an optical sensor that is in electrical communication with the rotatable mirror via an associated electrode. Electrical potential may be supplied to an appropriately configured optical sensor so that a variable range of voltages may be supplied to the rotatable mirror. In operation, an optical control beam may be directed onto the optical sensor where it may be sampled to determine its optical characteristics (e.g., optical wavelength, light intensity, position, polarization, duty cycle, etc.) The optical sensor may then supply voltage to the rotatable mirror based on the determined optical characteristics of the optical control beam, causing the rotatable mirror to rotate about one or more axes.
A method for controlling a micro-electromechanical system (MEMS), said method comprising:
An optically controlled micro-electromechanical system (MEMS), said MEMS comprising:
An optical cross connect switch utilizing an optically controlled micro-electromechanical system (MEMS), said switch comprising:
Dependencies are inferred from the claim text.