Separable modulator
AssigneeIdc, LLC
InventorsJeffrey Brian Sampsell, Mark W. Miles, Clarence Chui, Manish Kothari
Life of this patent
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Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
Claims32
A light modulator, comprising:
- a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
- supports attached to the second surface of the mirror;
- support posts suspending the mirror over the cavity by the supports, the support posts and supports being formed from a same layer of material;
- and
- an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
A light modulator, comprising:
- a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
- supports attached to the second surface of the mirror;
- support posts suspending the mirror over the cavity by the supports, the support posts having support post plugs;
- and
- an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
A light modulator, comprising:
- a mirror having first and second surfaces suspended over a cavity arranged under the first surface;
- supports attached to the second surface of the mirror;
- support posts suspending the mirror over the cavity by the supports;
- a bus structure attached to the support posts adjacent to the second surface of the mirror;
- and
- an electrode and an optical stack positioned opposite the first surface across the cavity from the mirror such that activation of the electrode causes the mirror to move towards the electrode, changing dimension and interference properties of the cavity.
A method of manufacturing a light modulator, the method comprising:
- forming an electrode and optical stack on the back of a transparent substrate;
- depositing a first sacrificial layer upon the electrode and optical stack;
- forming mirrors on the first sacrificial layer;
- depositing a second sacrificial layer upon the mirrors;
- forming post holes adjacent to the mirrors;
- using a planarization layer to form support post plugs;
- depositing a flexible layer on the support post plugs and forming attachments between the flexible layer and the mirror;
- and
- removing the first and second sacrificial layers.
A method of manufacturing a light modulator, the method comprising:
- forming an electrode and optical stack on the back of a transparent substrate;
- depositing a first sacrificial layer upon the electrode and optical stack;
- forming mirrors on the first sacrificial layer;
- depositing a second sacrificial layer upon the mirrors;
- forming post holes adjacent to the mirrors;
- depositing a flexible layer on the second sacrificial layer such that attachments between the flexible layer and the mirror are formed and the flexible layer fills the post holes forming support posts;
- and
- removing the first and second sacrificial layers.
A method of manufacturing a light modulator, the method comprising:
- forming a mirror over a first sacrificial layer attached to a flexible layer over a second sacrificial layer and having support posts;
- depositing a third sacrificial layer over the flexible layer;
- forming bus structures in a conductive layer on top of the third sacrificial layer arranged over the support posts;
- and
- removing the sacrificial layers.
Dependencies are inferred from the claim text.