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US 7,460,221 B2Granted
Method and system for detecting defects
AssigneeApplied Materials, Inc.
InventorsBoris Goldberg, Ron Naftali
Life of this patent
Estimating the term…
Abstract
System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.
Claims7
System for scanning a surface, comprising:
- a light source producing an illuminating light beam;
- an objective lens assembly, located between said light source and said surface;
- a first light detector;
- an annular mirror located between said light source and said objective lens assembly, wherein said annular mirror:
- passes said illuminating light beam to the objective lens assembly, passes a reflected bright-field light beam received from the objective lens assembly, and deflects at least a portion of a reflected gray-field light beam received from said objective lens assembly toward said first light detector.
2 more elements
Dependencies are inferred from the claim text.