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US 7,460,212 B2Granted
Collector configured of mirror shells
AssigneeCarl Zeiss SMT GmbH
InventorsWolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
Life of this patent
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Abstract
There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
Claims14
A collector comprising:
- a first mirror shell positioned inside a second mirror shell that has a chamfered end.
An illumination system comprising:
- a light source;
- a plane;
- and
- a collector that receives light from said light source, and illuminates an area in said plane,
- wherein said collector has a first mirror shell positioned inside a second mirror shell that has a chamfered end.
2 more elements
Dependencies are inferred from the claim text.