SAW component having an improved temperature coefficient
AssigneeEpcos AG
InventorsWerner Ruile, Ulrike Roesler, Ulrich Wolff, Anton Leidl, Gerd Scholl, Markus Hauser, Ulrich Knauer
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AssigneeEpcos AG
InventorsWerner Ruile, Ulrike Roesler, Ulrich Wolff, Anton Leidl, Gerd Scholl, Markus Hauser, Ulrich Knauer
Estimating the term…
An apparatus including a piezoelectric substrate having at least one transducer electrode structure. The structure having a metallization formed by one or more metals with a mean specific density that is at least 50% higher than that of aluminum. The structure having a compensation layer that is applied fully or partially over the metallization. The compensation layer is of a material having a temperature dependence of elastic constants that counteracts the temperature coefficient of frequency of the substrate. The compensation layer has a thickness that is less than 15% of an acoustic wavelength of a wave capable of propagation in the structure.
An apparatus comprising:
Dependencies are inferred from the claim text.