Thin film piezoelectric actuator

A thin film piezoelectric actuator comprising a driving part at least one end of which is supported by an anchor portion, the driving part including:

• a first piezoelectric film;
• a first lower electrode provided under the first piezoelectric film;
• a second lower electrode provided under the first piezoelectric film;
• a first intermediate electrode provided opposite to the first lower electrode above the first piezoelectric film;
• a second intermediate electrode provided opposite to the second lower electrode above the first piezoelectric film;
• a second piezoelectric film provided above the first and second intermediate electrodes;
• a first upper electrode provided opposite to the first intermediate electrode above the second piezoelectric film;
• a second upper electrode provided opposite to the second intermediate electrode above the second piezoelectric film;
• a first connection part for electrically connecting the first lower electrode and the second intermediate electrode via a first via hole formed in the first piezoelectric film;
• a second connection part for electrically connecting the second lower electrode and the first intermediate electrode via a second via hole formed in the first piezoelectric film;
• a third connection part for electrically connecting the second intermediate electrode and the first upper electrode via a third via hole formed in the second piezoeleciric film;
• and
• a fourth connection part for electrically connecting the first intermediate electrode and the second intermediate electrode via a fourth via hole formed in the second piezoelectric film.