X-Y stage driver having locking device and data storage system having the X-Y stage driver
AssigneeSamsung Electronics Co., Ltd.
InventorsHong-sik Park, Jong-youp Shim, Seung-bum Hong, Dong-ki Min
Life of this patent
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Abstract
An X-Y stage driver having a locking device and a data storage system having the X-Y stage driver. The X-Y stage driver includes an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.
Claims9
An X-Y stage driver having a locking device, the X-Y stage driver comprising:
- an X-Y stage;
- a supporting unit that supports the X-Y stage and comprises elastic beams that support corners of the X-Y stage;
- a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction;
- a stiffener that prevents the X-Y stage from rotating;
- and
- a locking device that fixes the stiffener by an electrostatic force.
Dependencies are inferred from the claim text.