Lithographic apparatus and motor

A lithographic apparatus comprising a motor to generate a force in a first direction and a force in a second direction, the motor comprising:

• a magnet assembly to generate a magnetic field which comprises along the first direction parts which are alternately orientated in substantially the first and the second direction, the parts extending in a third direction substantially perpendicular to the first and second direction,
• a first coil winding to carry a first current, the first coil winding to extend in the first direction from a first part to a second part of the magnetic field substantially orientated in the second direction and along a third part of the magnetic field oriented along the first direction and located between the first and second parts, the first and second parts of the magnetic field to interact with the first coil winding to generate the force in the first direction, and
• at least two second coil windings, each of the second coil windings configured to carry a second current and extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction,
• wherein the at least two second coil windings are spaced apart from each other in the third direction.

A lithographic apparatus comprising a motor to generate a force in a first direction and a force in a second direction, the motor comprising:

• a magnet assembly to generate a magnetic field which comprises along the first direction parts which are alternately orientated in substantially the first and the second direction, the parts extending in a third direction substantially perpendicular to the first and second direction;
• a first coil winding to carry a first current, the first coil winding to extend in the first direction from a first part to a second part of the magnetic field substantially orientated in the second direction and along a third part of the magnetic field oriented along the first direction and located between the first and second parts, the first and second parts of the magnetic field to interact with the first coil winding to generate the force in the first direction;
• a second coil winding to carry a second current, the second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction, and
• an additional magnet assembly to cooperate with a third coil winding to generate a force in the third direction,
• wherein the first and the second coil windings are spaced apart from each other in the third direction.

A motor to generate a force in a first direction and a force in a second direction, the motor comprising:

• a magnet assembly to generate a magnetic field which comprises along the first direction parts which are alternately orientated in substantially the first and the second direction, the parts extending in a third direction substantially perpendicular to the first and second direction,
• a first coil winding to carry a first current, the first coil winding to extend from a first part to a second part of the magnetic field substantially orientated in the second direction and along a third part of the magnetic field oriented along the first direction and located between the first and second parts, the first and second parts of the magnetic field to interact with the first coil winding to generate the force in the first direction, and
• a second coil winding to carry a second current, the second coil winding to extend between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction,
• wherein the first and the second coil windings are spaced apart from each other in the third direction.