Single crystal wafer and solar battery cell
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsTadahiro Ohmi, Shigetoshi Sugawa, Tatsuo Ito, Koichi Kanaya
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Abstract
The present invention provides a single crystal wafer, wherein the main surface has a plane or a plane equivalent to a plane tilting with respect to a [100] axis of single crystal by angles of α (0°<α<90°) for the [011] direction, β (0°<β<90°) for the [01-1] direction and γ (0°≦γ<45°) for the [10-1] or [101] direction. Thus, a single crystal wafer that can sufficiently bear device production processes even with a small wafer thickness is provided and thereby loss of single crystal raw material is reduced. Further, by using such a wafer, MIS type semiconductor devices and solar cells are provided at a low cost.
Claims8
A semiconductor silicon single crystal wafer, wherein the main surface of the semiconductor silicon single crystal wafer has a plane or a plane equivalent to a plane tilting with respect to a [100] axis of single crystal by angles of α (0°<α<90°) for the [011] direction, β (0°<β<90°) for the [01-1] direction and γ (0°<γ<45°) for the [10-1] or [101] direction, the diameter of the wafer is not less than 100 mm and not more than 200 mm, and the wafer satisfies a relationship of 2≦ thickness of wafer (μm)/diameter of wafer (mm) ≦3.
Dependencies are inferred from the claim text.