Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

An ion source comprising:

• an arc chamber housing defining an arc chamber;
• a low temperature vaporizer configured to supply a first dopant material to the arc chamber in a cold operating mode;
• a first electron source configured to ionize the first dopant material in the cold operating mode;
• a gas supply configured to supply a second dopant material to the arc chamber in a hot operating mode;
• and
• a second electron source including an indirectly heated cathode positioned within the arc chamber and a filament for heating the cathode, wherein the second electron source is configured to ionize the second dopant material in the hot operating mode, wherein the ion source supplies ions of the first dopant material in the cold operating mode and supplies ions of the second dopant material in the hot operating mode.

A method for generating ions in an arc chamber, comprising:

• supplying a first dopant material to the arc chamber in a first operating mode;
• ionizing the first dopant material in the first operating mode using a first electron source;
• supplying a second dopant material to the arc chamber in a second operating mode;
• and
• ionizing the second dopant material in the second operating mode using a second electron source, wherein the ion source supplies ions of the first dopant material in the first operating mode and supplies ions of the second dopant material in the second operating mode.

An ion source comprising:

• an arc chamber housing defining an arc chamber;
• a first dopant source configured to supply a first dopant material to the arc chamber in a first operating mode;
• a second dopant source configured to supply a second dopant material to the arc chamber in a second operating mode;
• and
• an electron source including a cathode positioned in the arc chamber, a filament configured to generate electrons when energized with an electrical current and a control element configured to direct the electrons into the arc chamber in the first operating mode and to direct the electrons to the cathode for heating thereof in the second operating mode.

A method for generating ions in an arc chamber, comprising:

• supplying a first dopant material to the arc chamber in a first operating mode;
• supplying a second dopant material to the arc chamber in a second operating mode;
• ionizing the first dopant material in the first operating mode by directing electrons into the arc chamber;
• and
• ionizing the second dopant material in the second operating mode by directing the electrons to a cathode positioned in the arc chamber, for heating of the cathode.

An ion beam generator comprising:

• a molecular ion source configured to generate molecular ions in a first operating mode;
• an atomic ion source configured to generate atomic ions in a second operating mode;
• and
• a switching element configured to direct molecular ions from the molecular ion source along a beamline in the first operating mode and configured to direct atomic ions from the atomic ion source along the beamline in the second operating mode.