Electron confinement inside magnet of ion implanter

A method of improving low energy ion beam space charge neutralization in an ion implanter, the method comprising the steps of:

• forming magnetic field concentrations adjacent first and second magnet pole of a magnet of the ion implanter with a first magnetic member mounted to the first magnet pole and a second magnetic member mounted to the second magnet pole, each magnetic member including an outer surface having a non-planar shape defined at least in part by a plurality of magnetic field concentration members;
• and
• introducing the low energy ion beam into a gap defined by the first and second magnet pole.

An analyzer magnet for an ion implanter, the analyzer magnet comprising:

• a magnetic pole member for mounting to an internal portion of the analyzer magnet, the magnetic pole member including an outer surface including magnetic field concentration members that form magnetic field concentrations adjacent the internal portion, wherein each magnetic field concentration member includes a ridge, and wherein the analyzer magnet includes a magnetic pole member at a first end and a second end thereof.