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AssigneeHitachi High-Technologies Corporation
InventorsMine Araki, Shunya Watanabe, Chisato Kamiya, Mitsugu Sato, Atsushi Takane, Akinari Morikawa, Atsushi Miyaki, Toru Ishitani
Estimating the term…
There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.
A charged particle beam device comprising:
A computer program product for use in a control unit which receives a signal based on a transmission electron and/or a back-scattered electron detected by a charged particle beam device to form a bright-field image or a back-scattered electron image and a dark-field image of a sample, the computer program product comprising:
A sample image forming method which scans a charged particle beam on a sample to form a bright-field image or a back-scattered electron image and a dark-field image of the sample based on an electron transmitted through the sample, the method comprising the steps of:
A charged particle beam device comprising:
A charged particle beam device comprising:
Dependencies are inferred from the claim text.