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US 7,459,549 B2Granted
Composition for preparing nanoporous material
AssigneeSamsung Corning Co., Ltd.
InventorsJin Heong Yim, Byoung Ki Choi, Duk Keun An
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Abstract
Disclosed herein is a composition for preparing a nanoporous material. The composition comprises i) a cyclodextrin derivative, ii) a thermostable matrix precursor, and iii) a solvent for dissolving the components i) and ii). The composition enables the preparation of a low dielectric constant film in which nanopores with a size of 20 Å or less are uniformly distributed.
Claims11
A cyclodextrin derivative represented by Formula 8 below:
- wherein n is an integer from 6 to 10;
- R1′ and R2′ are independently a divalent group derived from substituents containing OH, SH or NH2 which form a crosslinked structure;
- and R3 is —OR4, wherein R4 is a C2˜30 acyl group, a C1˜20 alkyl group, a C3˜10 cycloalkyl group, a C1˜20 hydroxyalkyl group, a carboxyl group, or a silicon compound represented by Sir1r2r3, wherein r1, r2 and r3 are independently a C1˜5 alkyl group, a C1˜5 alkoxy group, or a C6˜20 aryl group.
A composition for preparing a nanoporous material, comprising:
- i) at least one cyclodextrin derivative selected from compounds represented by Formula 8 below:
- wherein n is an integer of from 6 to 10;
- R1′ and R2′ are independently a divalent group derived from substituents containing OH, SH or NH2 which form a crosslinked structure;
- and R3 is —OR4 wherein R4 is a C2˜30 acyl group, a C1˜20 alkyl group, a C3˜10 cycloalkyl group, a C1˜20 hydroxyalkyl group, a carboxyl group, or a silicon compound represented by Sir1r2r3,wherein r1, r2 and r3 are independently a C1˜5 alkyl group, a C1˜5 alkoxy group, or a C6˜20 aryl group;
- and
- wherein n is an integer of from 3 to 10;
- R3′ is a divalent group derived from substituents containing OH, SH or NH2 which form a crosslinked structure;
- and R1 and R2 are independently —OR4 [in which R4 is a C2˜30 acyl group, a C1˜20 alkyl group, a C3˜10 cycloalkyl group, a C1˜20 hydroxyalkyl group, a carboxyl group, or a silicon compound represented by Sir1r2r3 (in which r1, r2 and r3 are independently a C1˜5 alkyl group, a C1˜5 alkoxy group, or a C6˜20 aryl group)];
- ii) a thermostable matrix precursor;
- and
- iii) a solvent for dissolving the components i) and ii).
8 more elements
Dependencies are inferred from the claim text.