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US 7,459,351 B2Granted
Method of manufacturing an AMOLED
AssigneeChunghwa Picture Tubes, Ltd.
InventorChen-Ming Chen
Life of this patent
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Abstract
The present invention relates to a method of manufacturing an AMOLED panel. The method comprises providing a substrate, forming a data line and a drain metal on the substrate, forming a buffer insulator layer, forming an active layer, forming a gate insulator layer, forming a gate metal, performing an ion doping to form a source and a drain, forming a via hole, forming a transparent electrode and a pixel define layer, and forming a LED on the transparent electrode.
Claims10
A method of manufacturing an active matrix organic light-emitting diode (AMOLED), the method comprising:
- providing a substrate;
- forming at least a data line and at least a drain metal on the substrate;
- forming a buffer insulator layer on the substrate, the data line and the drain metal;
- forming at least an active layer on the buffer insulator layer;
- forming a gate insulator layer on the active layer and the buffer insulator layer;
- forming a gate metal on the gate insulator layer above the active layer;
- using the gate metal as a self-alignment mask and doping an ion on the active layer to form a source and a drain on the corresponding sides of the gate metal;
- forming a plurality of via holes on the gate insulator layer that reach the data line, the drain metal, the drain and the source surface;
- forming a plurality of transparent electrodes on each via hole and the gate insulator layer surface, each transparent electrode electrically contacting with the data line, the drain, and the drain metal;
- forming a pixel define layer on the transparent electrode, the gate metal, and the gate insulator layer to expose the transparent electrode;
- and
- forming a light-emitting diode on the transparent electrode.
9 more elements
Dependencies are inferred from the claim text.