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US 7,459,325 B2Granted
MEMS passivation with transition metals
AssigneeTexas Instruments Incorporated
InventorsSimon Joshua Jacobs, Seth Adrian Miller
Life of this patent
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Abstract
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
Claims7
A method for fabricating a MEMS device comprising:
- electrochemically depositing on a surface of said device a transition metal of Group IVB VB, or VIB of the periodic chart, optionally oxidizing said metal through chemical or electrochemical means, and
- contacting said surface with an organic surfactant.
Dependencies are inferred from the claim text.