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US 7,459,267 B2Granted
Sacrificial compositions and methods of fabricating a structure using sacrificial compositions
AssigneeGeorgia Tech Research Corporation
InventorsPaul A. Kohl, Paul Jayachandran Joseph, Hollie Reed, Sue Bidstrup-Allen, Celesta E. White, Clifford Henderson
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Abstract
Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
Claims8
A method for fabricating a structure, comprising:
- disposing a composition onto a surface, wherein the composition includes a sacrificial polymer and a photoacid generator, wherein the sacrificial polymer is chosen from a polycarbonate, and a copolymer of polynorbornene and polynorbornene carbonate, and combinations thereof;
- exposing at least a portion of the composition to a first energy;
- and
- removing a portion of the composition via exposing the portions to a second energy to form a first air-gap in the composition, the removed portion corresponding to the portion exposed to the first energy.
1 more element
Dependencies are inferred from the claim text.