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AssigneesKabushiki Kaisha Kobe Seiko Sho, Asahi Glass Company, Limited
InventorsKazushi Hayashi, Toshihiro Kugimiya, Takashi Kobori, Junichi Ebisawa, Kazuo Sato, Yukio Yoshikawa
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An object of the present invention is to make it possible to uniformly supply of a gas onto a base material in a way simpler and lower in cost, and thus, to realize a high-quality surface treatment. For that purpose, in surface treatment of a base material (12) by supplying a surface-treating gas on the surface of the base material (12) while conveying it in a particular direction, the peripheral surface of a rotor having a cylindrical peripheral surface (24) is made to face, via a gap (23), the surface of the base material (12) or an opposing member (20) formed at a position separated from the base material and the rotor is rotated around the axis in the direction almost perpendicular to the base material (12)-conveying direction, as the means for supplying the surface-treating gas. By the rotation, the surface-treating gas is dragged in by the peripheral surface of the rotor (24), guided into the gap (23), and then, fed from the gap (23) onto the surface of the base material (12).
A surface-treatment method, comprising an operation of conveying a base material in a particular direction and a gas-supplying operation of supplying a surface-treating gas onto the surface of the base material, wherein the gas-supplying operation is performed by using a surface-treatment equipment having an opposing member formed at a position separated from the base material and a rotor with a cylindrical peripheral surface facing the opposing member, the opposing member and the cylindrical peripheral surface being separated by a narrow gap from each other, and by rotating the rotor around an axis almost perpendicular to the base material-conveying direction and allowing the surface-treating gas to be dragged by the cylindrical peripheral surface of the rotor into the narrow gap and further fed from the gap onto the base material surface.
A surface-treatment equipment, comprising a base material-conveying means of conveying a base material in a particular direction and a gas-supplying means of supplying a surface-treating gas onto the surface of the base material, wherein:
A surface-treatment equipment for treating the surface of a base material by subjecting a surface-treating gas to a chemical reaction on the base material surface or in a neighborhood thereof where an electric field for plasma generation is formed, comprising a base material-conveying means of conveying a base material in a particular direction and a gas-supplying means of supplying a surface-treating gas into the surface of the base material, wherein:
Dependencies are inferred from the claim text.