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US 7,459,095 B2Granted
Opaque chrome coating suitable for etching
AssigneeCorning Incorporated
InventorsRobert Bellman, Ljerka Ukrainczyk
Life of this patent
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Abstract
A substrate includes an opaque chrome coating on a surface of the substrate dry-etched to form an aperture, wherein chrome in the aperture is below detectable limit. A method of forming an opaque chrome coating having at least two layers on a substrate includes depositing an initial chrome layer having a thickness of less than 10 nm on the substrate without ion-assist or with undetectable ion-assist, and then depositing the remainder of the at least two layers, with or without ion-assist, to form an opaque chrome coating.
Claims10
A method of forming an opaque chrome coating on a substrate, comprising:
- providing a substrate and depositing an opaque chrome coating having three layers on said substrate, said deposition being:
- depositing an initial chrome layer having a thickness less than 10 nm on the substrate without ion-assist or with undetectable ion-assist;
- and
- depositing one of the remaining layers of the opaque chrome coating with or without ion-assist and depositing the other one of the remaining layers of the opaque chrome coating with ion-assist to thereby form an opaque chrome coating having three layers on said substrate;
- wherein ion-assist is defined as undetectable when the ion energies are less than or equal to about 25 V and current density is less than or equal to about 0.04 mA/cm2.
2 more elements
Dependencies are inferred from the claim text.