Light irradiation apparatus, crystallization apparatus, crystallization method and device
AssigneeAdvanced LCD Technologies Development Center Co., Ltd.
InventorsYukio Taniguchi, Masakiyo Matsumura
Life of this patent
Estimating the term…
Abstract
A light irradiation apparatus includes a light modulation element which has a phase step having a phase difference substantially different from 180°, an illumination optical system which illuminates the light modulation element, and an image formation optical system which forms, on an irradiation surface, a light intensity distribution based on a light beam phase-modulated by the light modulation element. The illumination optical system illuminates the light modulation element with an illumination light beam inclined in a direction normal to a step line of the phase step.
Claims7
A light irradiation apparatus comprising:
- a light modulation element which has a phase step having a phase difference substantially different from 180°;
- an illumination optical system which illuminates the light modulation element;
- and
- an image formation optical system which forms, on an irradiation surface, a light intensity distribution based on a light beam phase-modulated by the light modulation element,
- wherein the illumination optical system illuminates the light modulation element with an illumination light beam inclined in a direction normal to a step line of the phase step.
Dependencies are inferred from the claim text.