Pressure-regulating valve, functional liquid supplying apparatus, imaging apparatus, method of manufacturing electro-optic device, electro-optic device, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorTomonori Nakamura
Life of this patent
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Abstract
In a pressure-regulating valve which supplies a functional liquid from a functional liquid tank to a functional liquid droplet ejection head, using, as a reference regulating pressure, atmospheric pressure which a diaphragm receives, a valve-disc energizing spring, which energizes a valve disc for opening and closing a communication passage communicating a primary chamber and a secondary chamber, is configured so as to be separated from a housing main body along with a lid body.
Claims10
A pressure-regulating valve which is interposed between a functional liquid droplet ejection head for ejecting a functional liquid droplet to perform an imaging process on a workpiece and a functional liquid tank for supplying a functional liquid to the functional liquid droplet ejection head,
- supplies to the functional liquid droplet ejection head through a secondary chamber a functional liquid introduced from the functional liquid tank to a primary chamber, and
- opens and closes a communication passage for communicating the primary chamber and the secondary chamber using, as a reference regulating pressure, atmospheric pressure which a diaphragm constituting one surface of the secondary chamber and exposed to atmosphere receives,
- the pressure-regulating valve comprising:
- a valve housing forming the primary chamber and the secondary chamber;
- a valve disc for opening and closing the communication passage;
- and
- a valve-disc energizing spring for energizing the valve disc in a valve-closing direction, using as a receiver a spring-receiving portion of the valve housing, wherein
- the valve housing is constituted of a housing main body and a lid body having the spring-receiving portion and detachably fastened to the housing main body with screws,
- one end of the valve-disc energizing spring is engaged to the lid body and the other end of the valve-disc energizing spring is engaged to the valve disc, and
- the valve-disc energizing spring is configured so as to be separated from the housing main body along with separation of the lid body.
A pressure-regulating valve which is interposed between a functional liquid droplet ejection head for ejecting a functional liquid droplet to perform an imaging process on a workpiece and a functional liquid tank for supplying a functional liquid to the functional liquid droplet ejection head,
- supplies to the functional liquid droplet ejection head through a secondary chamber a functional liquid introduced from the functional liquid tank to a primary chamber, and
- opens and closes a communication passage for communicating the primary chamber and the secondary chamber using, as a reference regulating pressure, atmospheric pressure which a diaphragm constituting one surface of the secondary chamber and exposed to atmosphere receives,
- the pressure-regulating valve comprising:
- a valve housing forming the primary chamber and the secondary chamber;
- a valve disc for opening and closing the communication passage;
- and
- a valve-disc energizing spring for energizing the valve disc in a valve-closing direction, using as a receiver a spring-receiving portion of the valve housing, wherein
- the valve housing is constituted of a secondary-chamber housing forming the secondary chamber and the communication passage and of a primary-chamber housing having the spring-receiving portion and detachably fastened to the secondary-chamber housing with screws,
- one end of the valve-disc energizing spring is engaged to the secondary-chamber housing and the other end of the valve-disc energizing spring is engaged to the valve disc, and
- the valve-disc energizing spring is configured so as to be separated from the secondary-chamber housing along with separation of the primary-chamber housing.
A pressure-regulating valve which is interposed between a functional liquid droplet ejection head for ejecting a functional liquid droplet to perform an imaging process on a workpiece and a functional liquid tank for supplying a functional liquid to the functional liquid droplet ejection head,
- supplies to the functional liquid droplet ejection head through a secondary chamber a functional liquid introduced from the functional liquid tank to a primary chamber, and
- opens and closes a communication passage for communicating the primary chamber and the secondary chamber using, as a reference regulating pressure, atmospheric pressure which a diaphragm constituting one surface of the secondary chamber and exposed to atmosphere receives,
- the pressure-regulating valve comprising:
- a valve housing forming the primary chamber and the secondary chamber;
- a valve disc for opening and closing the communication passage;
- a valve-disc energizing spring for energizing the valve disc in a valve-closing direction, using as a receiver a spring-receiving portion of the valve housing;
- a negative-pressure holding spring for energizing the diaphragm in a direction resisting atmospheric pressure;
- and
- a diaphragm holder for holding the diaphragm in a stretched state, wherein
- the diaphragm is detachably attached to the valve housing through the diaphragm holder, and the negative-pressure holding spring is configured so as to be separated from the valve housing along with separation of the diaphragm.
Dependencies are inferred from the claim text.