Multi-axis force sensor chip and multi-axis force sensor using same

A multi-axis force sensor comprising:

• a multi-axis force sensor chip comprising a base member comprising an action part adapted to receive an external force, a support part supporting the action part, and connecting parts connecting the action part to the support part, the support part being disposed to surround the action part and separated from the action part by first holes, the action part having an external force action part to which the external force is applied, and non-deforming area parts which remain undeformed even when the external force acts on the external force action area part, the non-deforming area parts being formed as free ends of the action part that face away from the external force action area part and are surrounded by first holes;
• strain resistance devices provided on deforming parts of the connecting parts;
• and temperature-compensating resistance devices provided on the non-deforming area parts of the action part in positions that are between the action part and the first holes;
• a support plinth for supporting the multi-axis sensor chip by supporting the support part with a glass plinth;
• transmitting means for applying an external force to the external force action area part of the action part;
• and
• an attenuating mechanism for attenuating the external force.