Apparatus for evaluating piezoelectric film, and method for evaluating piezoelectric film
AssigneeFujitsu Limited
InventorsToshihisa Anazawa, Mineharu Tsukada
Life of this patent
Estimating the term…
Abstract
There are provided an apparatus for evaluating a piezoelectric film, which contains: a detection unit containing a pair of probes, each probe containing a cantilever and a probe tip; and an evaluation unit, wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes, and a method for evaluating a piezoelectric film by using the apparatus for evaluating a piezoelectric film.
Claims20
An apparatus for evaluating a piezoelectric film, comprising:
- a detection unit comprising a pair of probes, each probe comprising a cantilever and a probe tip;
- and
- a evaluation unit,
- wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes.
A method for evaluating a piezoelectric film by means of an apparatus for evaluating a piezoelectric film, comprising:
- respectively placing a pair of probe tips, which are respectively contained in a pair of probes, on both surfaces of a sample comprising a piezoelectric film to detect a displacement magnitude of the pair of probes;
- and
- evaluating either or both a deformation and displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes,
- wherein the apparatus comprises:
- a detection unit comprising the pair of probes, each probe comprising a cantilever and the probe tip;
- and
- a evaluation unit,
- wherein the detection unit is configured to respectively place the probe tips to both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both of deformation and displacement magnitude of the piezoelectric film based upon the detected displacement magnitude of the pair of probes.
Dependencies are inferred from the claim text.