Optical device of waveguide type and its production method
AssigneeNEC Corporation
InventorsKazuhiro Shiba, Koichi Naniwae, Shinya Sudo, Koji Kudo
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AssigneeNEC Corporation
InventorsKazuhiro Shiba, Koichi Naniwae, Shinya Sudo, Koji Kudo
Estimating the term…
Input ports (103a, 103b) formed from fundamental mode waveguides are provided at one end of a multimode waveguide (104). Further, an output port (105) formed from a fundamental mode waveguide is provided at the other end of the multimode waveguide (104). The multimode waveguide (104) has a width wider than those of the input ports (103a, 103b) and the output port (105), and provides modes including multimode to the waveguide. The multimode waveguide (104) is embedded with a buried layer (200). Both of the end faces of the multimode waveguide (104) are made to be planes equivalent to a (100) plane or planes inclined from these planes. In a case of inclined planes, the planes are made to be planes inclined to a direction that the waveguide region spreads toward a stacked direction of the semiconductor layers.
A waveguide optical device comprising:
A method of manufacturing a waveguide optical device, the method comprising:
Dependencies are inferred from the claim text.