Back to results
US 7,453,622 B2Granted
Micro-electromechanical system (mems) polyelectrolyte gel network pump
AssigneeIntel Corporation
InventorChoong Kooi Chee
Life of this patent
Estimating the term…
Abstract
According to embodiments of the present invention, a first layer of electrically conductive material may be disposed in a recess in a micro-electromechanical system (MEMS) base. An electrically charged gel network may be disposed in the recess on the first layer of electrically conductive material. A second layer of electrically conductive material may be disposed in the recess on the cross-linked co-polymer gel network. A functionalizer may be disposed on the first and the second layers of electrically conductive material.
Claims6
A method, comprising:
- changing an electrical charge on a cross-linked co-polymer gel network assembly, the polyelectrolyte gel network assembly being coupled to a micro-electromechanical system (MEMS) device;
- and
- moving the micro-electromechanical system (MEMS) device from a first position to a second position in response to changing the charge on the cross-linked co-polymer gel network assembly.
An article of manufacture, comprising:
- a machine-accessible medium having data that, when accessed by a machine, cause the machine to perform operations comprising:
- applying an electrical charge to a cross-linked co-polymer gel network assembly;
- moving a micro-electromechanical system (MEMS) device from a first position to a second position in response to applying the electrical charge to the cross-linked co-polymer gel network assembly;
- removing the electrical charge from the polyelectrolyte gel network assembly;
- and
- moving the micro-electromechanical system (MEMS) device from the second position back to the first position in response to removing the electrical charge from the polyelectrolyte gel network assembly.
3 more elements
Dependencies are inferred from the claim text.