Scanning device and fabrication method thereof
AssigneeLG Electronics Inc.
InventorsYoung-Joo Yee, Chang-Hyeon Ji, Seong-Hyok Kim
Life of this patent
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Abstract
A scanning device includes a mirror unit formed on a substrate so as to be pivotable centering around one axis for adjusting the direction of reflected light; a support frame formed at one surface of the mirror unit for preventing dynamic deflection of the mirror unit and supporting the mirror unit; and a driving unit provided on the substrate and driving the mirror unit. Thus, a dynamic deflection phenomenon does not occur when the mirror unit is pivoted centering around the pivoting axis. Accordingly, stable operation is possible and the angle of rotation of the mirror unit can be accurately adjusted, so that the scanning device can be effectively used in a high-speed precision scanning system.
Claims17
A scanning device comprising:
- a substrate having a center space portion and a side space portion, the side space portion disposed at each side of the center space portion;
- a mirror unit disposed at the center space portion and having a support frame, the support frame coupled with the mirror unit in order to prevent dynamic deflection of the mirror unit and supporting the mirror unit;
- a pair of elastic rotation support elements disposed at each side space portion in order to support the mirror unit against the substrate and to be a rotating axis of the mirror unit;
- and
- a driving unit provided at the side space portion and driving the pair of elastic rotation support elements in order to rotate the mirror unit,
- wherein the driving unit comprises:
- a movable electrode extended from an end of the mirror unit which is adjacent to an elastic rotation support element and disposed at the side space portion;
- and
- a fixed electrode extended from a portion of the substrate and disposed at the side space portion in order to interwork with the movable electrode by electrostatic force.
A scanning device array comprising:
- a plurality of unit scanning devices arranged in a matrix form, wherein each scanning device comprises:
- a substrate having a center space portion and a side space portion, the side space portion disposed at each side of the center space portion;
- a mirror unit disposed at the center space portion and having a support frame, the support frame coupled with the mirror unit in order to prevent dynamic deflection of the mirror unit and supporting the mirror unit;
- a pair of elastic rotation support elements disposed at each side space portion in order to support the mirror unit against the substrate and to be a rotating axis of the mirror unit;
- and
- a driving unit provided at the side space portion and driving the pair of elastic rotation support elements in order to rotate the mirror unit,
- wherein the driving unit comprises:
- a movable electrode extended from an end of the mirror unit which is adjacent to an elastic rotation support element and disposed at the side space portion;
- and
- a fixed electrode extended from a portion of the substrate and disposed at the side space portion in order to interwork with the movable electrode by electrostatic force.
Dependencies are inferred from the claim text.