Back to results
US 7,453,566 B2Granted
Hybrid plasma element monitor
AssigneeMassachusetts Institute of Technology
InventorsKamal Hadidi, Paul Woskov
Life of this patent
Estimating the term…
Abstract
Hybrid plasma monitor. A ground electrode is spaced apart from a high voltage electrode supporting an electric discharge therebetween to generate a plasma. The ground electrode and the high voltage electrode form an annular region into which a sample is introduced for generating a plasma. Microwave radiation couples into the plasma to sustain the plasma. A light detector such as a spectrometer receives light resulting from atomic emissions from the sample to analyze elements in the sample.
Claims27
Hybrid plasma element monitor comprising:
- a ground electrode spaced apart from a high-voltage electrode for maintaining an electric discharge therebetween to generate a plasma;
- the ground electrode and the high voltage electrode forming an annular region into which a sample is introduced for exposure to the plasma;
- a source of microwave radiation, the microwave radiation coupling into the plasma;
- and
- a light detector for receiving light resulting from atomic emissions to analyze elements in the sample.
2 more elements
Dependencies are inferred from the claim text.