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US 7,453,275 B2Granted
Probe card
AssigneeElpida Memory, Inc.
InventorTomoharu Yamaguchi
Life of this patent
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Abstract
The board of a probe card of the present invention comprises a first substrate having a first inclined surface at the side surfaces and a second substrate having a second inclined surface. The first substrate and the second substrate are disposed such that the first inclined surface and the second inclined surface are opposed to each other. Between the first inclined surface and the second inclined surface, a stress absorber having electroconductivity is sandwiched.
Claims18
A probe card comprising:
- a board having through-holes formed therein, into which probes are to be inserted, and probes extending from said through-holes are abutted on a measurement object so as to measure a variety of electrical properties of said measurement object;
- and
- an electroconductive elastic member,
- wherein said board extends along a plane,
- wherein said board comprises a first substrate having a first inclined end surface at an end thereof, and a second substrate having a second inclined end surface at an end thereof, said first inclined end surface and said second inclined end surface being inclined with respect to the plane, and
- wherein said first substrate and said second substrate are disposed adjacent one another such that said first inclined end surface and said second inclined end surface are opposed to each other, and said electroconductive elastic member is located between said first inclined end surface and said second inclined end surface.
3 more elements
A probe card comprising:
- a first substrate having a ramped end surface at an end thereof the first substrate having through-holes for receiving a plurality of probes;
- a second substrate having a ramped end surface at an end thereof;
- and
- an electroconductive elastic member,
- wherein said first substrate and said second substrate are disposed adjacent one another such that said first substrate ramped end surface and said second substrate ramped end surface face one another, and such that the electroconductive elastic member is located between said first substrate ramped end surface and said second substrate ramped end surface.
2 more elements
A probe card comprising:
- a first substrate having a ramped end surface at an end thereof, said first substrate having through-holes for receiving a plurality of probes;
- a second substrate having a ramped end surface at an end thereof;
- and
- an elastic member located between said first substrate ramped end surface and said second substrate ramped end surface,
- wherein said probe card extends along a plane, and
- wherein said ramped end surface of said first substrate and said ramped end surface of said second substrate incline at said plane.
3 more elements
Dependencies are inferred from the claim text.