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US 7,453,256 B2Granted
Micro-electromechanical system (MEMS) based current and magnetic field sensor
AssigneeGeneral Electric Company
InventorsErtu{hacek over (g)}rul Berkcan, Shankar Chandrasekaran
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Abstract
A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.
Claims9
A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a current carrying conductor comprising:
- a magneto-MEMS component for sensing the magnetic field;
- an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are configured to provide an unprocessed indication of the magnetic field.
Dependencies are inferred from the claim text.