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US 7,453,254 B2Granted
Microstructured chemical sensor
Assigneeparagon AG
InventorsHeribert Weber, Doris Schielein, Christian Krummel, Christoph Schelling
Life of this patent
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Abstract
A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.
Claims10
A chemical sensor comprising:
- a substrate;
- a first metallization plane on the substrate;
- an electrode structure formed in the first metallization plane,
- a passivation layer applied to the first metallization plane and formed with contact holes,
- a chemical-sensitive ceramic layer on the passivation layer and in the contact holes and capable of changing electrical properties when contacted by predetermined chemicals;
- and
- a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.
4 more elements
Dependencies are inferred from the claim text.