Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

A positioning device, comprising:

• a stator and mover, the mover being movable relative to the stator;
• a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator;
• and
• a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain, wherein the positioning device, including the position sensor and the controller arranged in a control loop, the controller further being configured, for error signals having a magnitude in a predefined range, to selectively set the gain to a value higher than a value for error signals having a magnitude outside the range.

A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate, the lithographic apparatus comprising a positioning device for positioning part of the lithographic apparatus, the positioning device comprising:

• a stator and mover, the mover being movable relative to the stator;
• a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator;
• and
• a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain, wherein the positioning device, including the position sensor and the controller arranged in a control loop, the controller further being configured, for error signals having a magnitude in a predefined range, to selectively set the gain to a value higher than a value for error signals having a magnitude outside the range.

A lithographic apparatus, comprising:

• an illumination system configured to condition a radiation beam;
• a patterning support configured to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
• a substrate support configured to hold a substrate;
• a projection system configured to project the patterned radiation beam onto a target portion of the substrate;
• a positioning device for positioning at one of the patterning support and the substrate support, the positioning device comprising
• a stator and mover, the mover being movable relative to the stator;
• a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator;
• a controller configured to receive the position signal, comparing it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain, wherein the positioning device, including the position sensor and the controller arranged in a control loop, the controller further being configured, for error signals having a magnitude in a predefined range, to selectively set the gain to a value higher than a value for error signals having a magnitude outside the range.

A data carrier comprising a computer code representing machine-readable instructions that, when loaded in a computer system, cause the computer system to act as a controller to perform a method for controlling a positioning device, the positioning device comprising a stator and mover, the mover being movable relative to the stator;

• a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator;
• a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain;
• the positioning device, including the position sensor and the controller are arranged in a control loop, the method comprising:
• selectively setting the gain, for error signals having a magnitude in a predefined range, to a value higher than a value for error signals having a magnitude outside the range.