Induction concentration remote atmospheric pressure plasma generating apparatus
AssigneeUION Co., Ltd.
InventorSeok Kyun Song
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Abstract
The present invention relates, in general, to an induction concentration remote atmospheric pressure plasma generating apparatus, and more particularly, to an induction concentration remote atmospheric pressure plasma generating apparatus in which induction electrodes, discharge electrodes and a ground electrode are used, so that a plasma can be generated in a plasma cell including several metal discharge electrodes by using one power supply device while not generating arc between the metal electrodes, and a high-density plasma is generated at local regions due to a discharge between the metal electrodes and is thus spouted to the surface of a sample by means of the pressure of a working gas. Thus, a plasma is not generated in unnecessary regions.
Claims3
An induction concentration remote atmospheric pressure plasma generating apparatus, comprising:
- a hot electrode having one or more holes;
- induction electrodes disposed within the hot electrode holes, wherein the hot electrode holes and the induction electrodes are spaced apart from each other at predetermined intervals;
- a dielectric material surrounding the hot electrode and the induction electrodes, wherein the induction electrodes are projected downwardly from the dielectric material;
- a spring disposed below the induction electrodes;
- a discharge electrode disposed below the spring, wherein a lower side of the induction electrode, the spring and the discharge electrodes are located within a discharge electrode holding hole of a ceramic dielectric material having a narrow discharge hole;
- a ground electrode having a small hole and disposed below the narrow discharge hole of the ceramic dielectric material, the ground electrode being grounded;
- and
- a chamber for accommodating the above constituent elements and having a working gas supply unit for supplying a working gas.
Dependencies are inferred from the claim text.