Micro oscillating element

A micro oscillating element formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer, the oscillating element comprising:

• an oscillation section including a movable functional section;
• an oscillation section supporting frame;
• a torsional joining section for joining the oscillation section and the frame, the joining section defining an oscillation axis for oscillating action of the oscillation section;
• a narrow structural section formed in the first conductive layer;
• wherein the movable functional section is a part formed in the first conductive layer, and the frame is a part formed in the second conductive layer;
• wherein the narrow structural section is fixed to the frame via the insulating layer and is narrower than the frame.

A micro oscillating element formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer, the oscillating element comprising:

• an oscillation section including a movable functional section;
• an oscillation section supporting frame;
• a torsional joining section for joining the oscillation section and the frame, the joining section defining an oscillation axis for oscillating action of the oscillation section;
• wherein the movable functional section is a part formed in the first conductive layer, and the frame is a part formed in the second conductive layer;
• wherein the oscillation section includes an arm section and a first comb-tooth electrode, the arm section extending from the movable functional section in a direction intersecting the oscillation axis, the first comb-tooth electrode including a plurality of first electrode teeth that extend from the arm section in a direction intersecting the arm section and are separated from each other;
• and
• wherein the frame is provided with a second comb-tooth electrode to cooperate with the first comb-tooth electrode for oscillating the oscillation section, the second comb-tooth electrode including a plurality of second electrode teeth that extend from the frame in a direction intersecting the arm section and are separated from each other.

A micro oscillating element formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer, the oscillating element comprising:

• an oscillation section including a movable functional section;
• an oscillation section supporting frame;
• a torsional joining section for joining the oscillation section and the frame, the joining section defining an oscillation axis for oscillating action of the oscillation section;
• an additional frame and an additional torsional joining section;
• wherein the movable functional section is a part formed in the first conductive layer, and the frame is a part formed in the second conductive layer;
• and
• wherein the additional torsional joining section joins the additional frame and the oscillation section supporting frame and also defines an oscillation axis for oscillating action of the oscillation section supporting frame.

A micro oscillating element formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer, the oscillating element comprising:

• an oscillation section including a movable functional section;
• an oscillation section supporting frame;
• a torsional joining section for joining the oscillation section and the frame, the joining section defining an oscillation axis for oscillating action of the oscillation section;
• a thin structural section fixed to the frame;
• wherein the movable functional section is a part formed in the first conductive layer, and at least a part of the frame is formed in the second conductive layer;
• and
• wherein the thin structural section is formed in the first conductive layer and is thinner than the first conductive layer.

A micro oscillating element formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer, the oscillating element comprising:

• an oscillation section including a movable functional section;
• an oscillation section supporting frame;
• a torsional joining section for joining the oscillation section and the frame, the joining section defining an oscillation axis for oscillating action of the oscillation section;
• a narrow structural section formed in the first conductive layer;
• wherein the movable functional section is a part formed in the first conductive layer, and at least a part of the frame is formed in the second conductive layer;
• wherein the narrow structural section is fixed to the frame and is narrower than the frame at least partially.