Self-aligned planar double-gate transistor structure

A semiconductor structure comprising:

• a double-gate transistor located in a semiconductor wafer including a substrate and a single crystal silicon SOI device layer having a thickness from about 2 to about 50 nm, said transistor comprising:
• a back gate thermal oxide layer having a thickness from about 1 to about 3 nm located below said single crystal silicon SOI device layer;
• a back gate polysilicon electrode having a thickness from about 100 to about 400 nm located below said back gate thermal oxide layer;
• a front gate thermal oxide located above said single crystal silicon SOI device layer;
• a front gate polysilicon electrode layer having a thickness from about 40 to about 250 nm located above said front gate thermal oxide and vertically aligned with said back gate polysilicon electrode;
• a transistor body disposed above said back gate thermal oxide layer, symmetric with said front gate polysilicon electrode layer, said back gate polysilicon electrode having a layer of oxide located below said transistor body and on either side of a central portion of said back gate polysilicon electrode, thereby positioning said back gate polysilicon electrode self-aligned with said front gate polysilicon electrode layer;
• source and drain electrodes on opposite sides of said transistor body;
• and
• conductive S/D contact members disposed above said source and drain electrodes, said conductive S/D members extending above said front gate thermal oxide layer to a contact surface at a height less than said front gate polysilicon electrode.