Bushing unit with integrated conductor in ion accelerating device and related method
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsJames P. Buonodono, Edward W. Bell, Piotr Lubicki
Life of this patent
Estimating the term…
Abstract
An ion accelerating device includes a series of bushing units and a series of resistor circuit units. Each resistor circuit unit is coupled to one bushing unit. A bushing unit includes three integrated conductors to establish connections to the coupled resistor circuit unit and to an immediately adjacent bushing unit such that a voltage to the bushing unit may be degraded by the resistor circuit unit before reaching the lens and that two bushing units may contact one another directly.
Claims20
An ion accelerating device of an ion implantation system, the ion accelerating device comprising:
- a first bushing unit including a first conductor, a second different conductor and a lens mounting plate;
- and
- a first resistor circuit unit coupled to the first bushing unit;
- wherein the first conductor connects an input terminal of the first bushing unit to an input terminal of the first resistor circuit unit, and the second conductor connects an output terminal of the first resistor circuit unit to an input terminal of the lens mounting plate.
An accelerating column bushing unit, the bushing unit comprising:
- a lens mounting plate;
- and
- a first conductor and a second different conductor;
- wherein the first conductor connects an input terminal of the bushing unit to an input terminal of a resistor circuit unit coupled to the bushing unit, and the second conductor connects an output terminal of the resistor circuit unit to an input terminal of the lens mounting plate.
A method of providing a voltage supply to a lens in an ion accelerating device, the method comprising:
- providing a series of bushing units and a series of resistor circuit units, each resistor circuit unit coupled to one bushing unit, each bushing unit including a first conductor, a second different conductor and a lens mounting plate;
- connecting an input terminal of one bushing unit to an input terminal of a respective resistor circuit unit using the first conductor;
- and
- connecting an output terminal of the respective resistor circuit unit to an input terminal of the lens mounting plate of the bushing unit using the second conductor to provide a voltage to a lens installed on the lens mounting plate.
Dependencies are inferred from the claim text.