Energy-filtering cathode lens microscopy instrument
AssigneeInternational Business Machines Corporation
InventorRudolf M. Tromp
Life of this patent
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Abstract
An energy filtering microscopy instrument is provided. An objective lens is disposed for reception of electrons in order to form an electron diffraction pattern in a backfocal plane of the objective lens. An entrance aperture disposed in the backfocal plane of the objective lens for filtering a slice of the electron diffraction pattern. A magnetic deflector has an entrance plane and an exit plane. The entrance aperture is disposed in the entrance plane. The magnetic deflector is disposed to receive the slice of the electron diffraction pattern and project an energy dispersed electron diffraction pattern to the exit plane. An exit aperture is disposed in the exit plane of the magnetic deflector for selection of desired electron energy of the energy dispersed electron diffraction pattern.
Claims21
An energy filtering microscopy instrument comprising:
- an objective lens disposed for reception of electrons, the objective lens being configured to form an electron diffraction pattern in a backfocal plane of the objective lens;
- an entrance aperture disposed in the backfocal plane of the objective lens for filtering a slice of the electron diffraction pattern;
- a magnetic deflector having an entrance plane and an exit plane, wherein the entrance aperture is disposed in the entrance plane and the magnetic deflector is disposed to receive the slice of the electron diffraction pattern and project an energy dispersed electron diffraction pattern to the exit plane;
- and
- an exit aperture disposed in the exit plane of the magnetic deflector for selection of desired electron energy of the energy dispersed electron diffraction pattern.
A method of energy filtering in an electron microscopy instrument comprising the steps of:
- receiving electrons at an objective lens in order to form an electron diffraction pattern in a backfocal plane of the objective lens;
- filtering a slice of the electron diffraction pattern at an entrance aperture disposed in the backfocal plane of the objective lens;
- receiving the slice of the electron diffraction pattern at a magnetic deflector having an entrance plane and an exit plane, wherein the entrance aperture is disposed in the entrance plane;
- projecting an energy dispersed electron diffraction pattern in the exit plane of the magnetic deflector;
- and
- selecting a desired electron energy of the energy dispersed electron diffraction pattern at an exit aperture disposed in the exit plane of the magnetic deflector.
Dependencies are inferred from the claim text.